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了解:碳化硅材料技术对器件可靠性的影响

碳化硅产业链包含碳化硅粉末、碳化硅晶锭、碳化硅衬底、碳化硅外延、碳化硅晶圆、碳化硅芯片和碳化硅器件封装环节。其中衬底、外延片、晶圆、器件封测是碳化硅价值链中比较为关键的四个环节,衬底成本占到碳化硅器件总成本的50%,外延、晶圆和封装测试成本分别为25%、20%和5%。碳化硅材料的可靠性对比较终器件的性能有着举足轻重的意义,基本半导体从产业链各环节探究材料特性及缺陷产生的原因,与上下游企业协同合作提升碳化硅功率器件的可靠性。





然而在碳化硅产业链过程中各个工艺阶段的烘烤设备是必不可少的一部分。


外延片氮气烘箱,晶圆坚膜烘箱,碳化硅衬底HMDS烤箱、碳化硅晶圆HMDS烘箱,碳化硅芯片氧固化炉和碳化硅器件封装烤箱等一系列设备。


百级洁净烤箱,高温洁净烘箱用于半导体制造中硅片、碳化硅、砷化镓、铌酸锂、玻璃等材料涂胶前的预处理烘烤、涂胶后坚膜烘烤和显影后的高温烘烤;也适用于电子液晶显示、LCD、CMOS、IS、医药、验室等生产及科研部门;也可用于非挥发性及非易燃易爆物品的干燥、热处理、老化等其他高温试验。


HMDS烘箱是六甲基二硅氮烷(HMDS)表面处理的工艺是匀胶前衬底“增附处理。在光刻中,通常会用到一些例如蓝宝石、碳化硅、氮化镓、砷化镓甚至是贵金属薄膜等衬底,这类衬底与光刻胶的粘附性往往不怎么理想,这会导致后续的光刻显影环节出现“裂纹甚至是漂胶等问题。因此必须通过工艺手段改善,这个步骤我们叫做增附处理或者叫做助黏。










这意味着无氧烘箱是行业的风向标,能够给人们带来很大的自信心。上海隽思实验仪器有限公司拥有多台先进的专业生产设备,公司是一个专注多年热处理设备、仪器设备的生产厂家,拥有高尖端的技术人才,高素质的工作团队,丰富的生产经验。http://www.junsicn.com/

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